IMSE major instrumentation is available to researchers with IMSE User Accounts at hourly cost.

Core Description

The IMSE user facilities include a wide variety of instruments to support materials science and engineering research. The materials characterization suite includes electron microscopes and other surface characterization tools to investigate the microstructure and composition of (primarily inorganic) materials. The micro- and nanofabrication facility is housed in class 100, 1000 and 10000 cleanrooms, and includes instruments for the precise deposition and removal of materials to construct microelectronic, microfluidic, and other devices. The facility is supported by 4 FTE technical staff members, and is located on the lower level of Rudolph Hall (Earth and Planetary Sciences) on the Danforth Campus.”


Service available to All entities, including for-profit organizations.

Priority service for Washington University only.

Additional information:

All users must complete the EHS lab safety training and the IMSE lab specific training prior to using any equipment.


  • Training for basic operation of instruments for the purposes of licensing users
  • Advanced training/mentoring of users.
  • Characterization and sample analysis.


  • Atomic Force Microscope (AFM), Bruker Dimensions ICON AFM
  • Electron Beam Lithography, Elionix ELS-S50EX
  • Environmental Scanning Electron Microscope (ESEM), Thermofisher Quatto S ESEM
  • Focused Ion Beam FIB (FIB), Thermofisher¬†Scios 2 DualBeam FIB
  • TEM Sample Preparation Laboratory
  • Thermo Mechanical Analyzer (TMA), Mettler Toledo Model TMA/SDTA 840
  • X-Ray Powder Diffraction (XRD), Rigaku D-Max-B Powder Diffractometer
  • X-Ray/Ultraviolet Photoelectron Spectrometer (XPS), Physical Electronics 5000 VersaProbe II Scanning ESCA Microprobe
  • AJA E-beam Evaporator, AJA International
  • Asher
  • Atomic Layer Deposition, Savannah S100 Thermal ALD
  • Dicing Saw, Disco Model DAD 323
  • Ellipsometer, J.A. Woollam alpha-SE spectroscopic
  • Heidelberg Laser Lithography System
  • Mask Aligner 3", Karl Suss MJB3
  • Mask Aligner 4", Klo√© SA
  • Nanofac PECVD System, Oxford Instrument
  • Optical Microscopes
  • Parylene Deposition System, Specialty Coating Systems PDS 2010 Labcoter
  • Probe Station, Signatone S-1008 and Keithley 238 high current source measurement unit
  • Profilometer, KLA-Tencor Alpha-Step D-100
  • Reactive Ion Etch (RIE), Oxford Plasma Lab 100 Inductively Coupled Plasma (ICP)
  • Solvent and Acid Fume Hoods
  • Spin Coater, Brewer Science CEE 200X
  • Sputter Deposition Tool, Kurt J. Lesker PVD 75 RF and DC
  • Thermal Evaporator, Edwards 306 Vacuum Coater
  • Tube Furnace, Lindberg/Blue M
  • UV Ozone Cleaner, UVOCS


Please contact this core directly for pricing information.

School of Arts & Sciences
McKelvey School of Engineering